JPH0470750U - - Google Patents
Info
- Publication number
- JPH0470750U JPH0470750U JP11463990U JP11463990U JPH0470750U JP H0470750 U JPH0470750 U JP H0470750U JP 11463990 U JP11463990 U JP 11463990U JP 11463990 U JP11463990 U JP 11463990U JP H0470750 U JPH0470750 U JP H0470750U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer carrier
- frame
- teflon
- teflon sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004809 Teflon Substances 0.000 claims description 4
- 229920006362 Teflon® Polymers 0.000 claims description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims 1
Landscapes
- Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11463990U JP2508271Y2 (ja) | 1990-10-30 | 1990-10-30 | ウエハ―キャリア |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11463990U JP2508271Y2 (ja) | 1990-10-30 | 1990-10-30 | ウエハ―キャリア |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0470750U true JPH0470750U (en]) | 1992-06-23 |
| JP2508271Y2 JP2508271Y2 (ja) | 1996-08-21 |
Family
ID=31862346
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11463990U Expired - Lifetime JP2508271Y2 (ja) | 1990-10-30 | 1990-10-30 | ウエハ―キャリア |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2508271Y2 (en]) |
-
1990
- 1990-10-30 JP JP11463990U patent/JP2508271Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2508271Y2 (ja) | 1996-08-21 |